Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9878397 | SiC wafer producing method | Kazuya Hirata | 2018-01-30 |
| 9475152 | Laser processing method and laser processing apparatus | Kuniaki Iwashiro | 2016-10-25 |
| 8263900 | Laser beam processing machine | Jun Maehara | 2012-09-11 |
| 7713845 | Laser processing method for wafer | Kenji Asano, Yohei Yamashita | 2010-05-11 |
| 7642485 | Laser beam processing machine | Noboru Takeda, Hiroshi Morikazu, Satoshi Genda | 2010-01-05 |
| 7601616 | Wafer laser processing method | Hiroshi Morikazu, Ryugo Oba, Toshio Tsuchiya, Koji Yamaguchi | 2009-10-13 |
| 7585751 | Wafer dividing method using laser beam with an annular spot | Naotoshi Kirihara, Koji Yamaguchi | 2009-09-08 |
| 7582541 | Wafer laser processing method | Noboru Takeda | 2009-09-01 |
| 7557904 | Wafer holding mechanism | Naoki Ohmiya, Satoshi Genda, Noboru Takeda, Koichi Takeyama, Hiroshi Morikazu +1 more | 2009-07-07 |
| 7553777 | Silicon wafer laser processing method and laser beam processing machine | Yusuke Nagai, Yosuke Watanabe | 2009-06-30 |
| 7473866 | Laser processing apparatus | Hiroshi Morikazu, Toshio Tsuchiya, Koichi Takeyama | 2009-01-06 |
| 7449396 | Wafer dividing method | Masahiro Murata, Yusuke Nagai, Satoshi Kobayashi, Naoki Ohmiya | 2008-11-11 |
| 7405376 | Processing apparatus using laser beam | Satoshi Kobayashi | 2008-07-29 |
| 7332415 | Silicon wafer dividing method and apparatus | Yusuke Nagai, Satoshi Kobayashi | 2008-02-19 |
| 7232741 | Wafer dividing method | Yusuke Nagai, Masaru Nakamura, Satoshi Kobayashi | 2007-06-19 |
| 7179722 | Wafer dividing method | Masahiro Murata, Yusuke Nagai, Satoshi Kobayashi, Naoki Ohmiya | 2007-02-20 |
| 7166167 | Laser CVD device and laser CVD method | Atsushi Ueda | 2007-01-23 |
| 6926801 | Laser machining method and apparatus | — | 2005-08-09 |
| 6890387 | Method and device for correcting pattern film on a semiconductor substrate | Makoto Oomiya | 2005-05-10 |
| 6879605 | Method and apparatus for performing pattern defect repair using Q-switched mode-locked pulse laser | Yukio Kyusho, Yoichi Yoshino | 2005-04-12 |
| 6733848 | Thin film forming equipment and method | Makoto Omiya | 2004-05-11 |
| 6678304 | Laser correction method and apparatus | — | 2004-01-13 |
| 6664524 | Focusing method | Yukio Ogura, Hideyuki Moribe | 2003-12-16 |
| 6496255 | Measurement of crystal face orientation | Kazumi Sugai, Belgacem Haba | 2002-12-17 |
| 6336975 | Thin film forming equipment and method | Makoto Omiya | 2002-01-08 |