Wafer holding mechanism

Assignee

• Disco

Inventors

• Naoki Ohmiya (8 patents)
• Satoshi Genda (9 patents)
• Noboru Takeda (33 patents)
• Koichi Takeyama (3 patents)
• Yukio Morishige (32 patents)
• Hiroshi Morikazu (95 patents)
• Hiroshi Nomura (412 patents)

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