Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6333130 | Method and apparatus for correcting defects in photomask | — | 2001-12-25 |
| 6136096 | Method and apparatus for correcting defects in photomask | — | 2000-10-24 |
| 5628926 | Method of forming via holes in a insulation film and method of cutting the insulation film | Haba Belgacem | 1997-05-13 |
| 5343271 | Exposure apparatus for drawing patterns on substrates | — | 1994-08-30 |
| 4976930 | Method and apparatus for inducing photochemical reaction | Shunji Kishida, Hiroyuki Yokoyama, Kunihiko Washio | 1990-12-11 |
| 4873413 | Method and apparatus for writing a line on a patterned substrate | Fumihiko Uesugi | 1989-10-10 |
| 4711790 | Optical CVD method with a strong optical intensity used during an initial period and device therefor | — | 1987-12-08 |