Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8317896 | Method of recycling useful metal | Tomoyuki Ubusawa, Tomoyuki Furuyama, Akihiro Morikaku, Kumpei Tanaka | 2012-11-27 |
| 6054383 | Fabrication method of semiconductor device | Mieko Suzuki | 2000-04-25 |
| 5939771 | Semiconductor device having an organic resin layer and silicon oxide layer containing fluorine for preventing crosstalk between metal lines and a method of manufacturing the same | Tatsuya Usami | 1999-08-17 |
| 5891234 | Spin on glass material and method for forming a semiconductor device by using improved spin on glass material | Kenichi Koyanagi, Koji Kishimoto | 1999-04-06 |
| 5840631 | Method of manufacturing semiconductor device | Akira Kubo, Koji Kishimoto | 1998-11-24 |
| 5776829 | Method for forming multilevel interconnections in a semiconductor device | Makoto Sekine | 1998-07-07 |
| 5744378 | Method for fabricating a semiconductor device having multilevel interconnections | — | 1998-04-28 |
| 5607880 | Method of fabricating multilevel interconnections in a semiconductor integrated circuit | Mieko Suzuki | 1997-03-04 |
| 5521424 | Semiconductor device having a silicon oxide film containing fluorine atoms | Kazuyoshi Ueno | 1996-05-28 |
| 5506177 | Fabrication process for multilevel interconnections in a semiconductor device | Koji Kishimoto | 1996-04-09 |
| 5491108 | Method of producing semiconductor integrated circuit device having interplayer insulating film covering substrate | Mieko Suzuki, Yukinobu Murao, Takaho Tanigawa, Hiroki Koga | 1996-02-13 |
| 5468682 | Method of manufacturing semiconductor device using the abrasive | — | 1995-11-21 |
| 5444023 | Method of fabricating a semiconductor device having a multilayer wiring structure and using a fluorine compound-containing gas | — | 1995-08-22 |
| 5420075 | Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator | Mieko Suzuki | 1995-05-30 |
| 5407529 | Method for manufacturing semiconductor device | — | 1995-04-18 |
| 5405805 | Method for forming interconnect structure, insulating films and surface protective films of semiconductor device | — | 1995-04-11 |
| 5399529 | Process for producing semiconductor devices | — | 1995-03-21 |
| 5334552 | Method for fabricating a semiconductor device having a multi-layered interconnection structure | — | 1994-08-02 |
| 5288518 | Chemical vapor deposition method for forming fluorine containing silicon oxide film | — | 1994-02-22 |
| 5215787 | Method of forming silicon oxide film containing fluorine | — | 1993-06-01 |