Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7167229 | Liquid crystal display element and projection display device | Akiko Toriyama | 2007-01-23 |
| 7123336 | Twisted nematic liquid crystal material with certain values for dielectric constant anisotropy, twisted elasticity modulus and refractive index anisotropy | Akiko Toriyama | 2006-10-17 |
| 6951512 | Chemical mechanical polishing apparatus and method of chemical mechanical polishing | Yasuaki Tsuchiya | 2005-10-04 |
| 6783446 | Chemical mechanical polishing apparatus and method of chemical mechanical polishing | Yasuaki Tsuchiya | 2004-08-31 |
| 6551914 | Method of forming polish stop by plasma treatment for interconnection | Akira Kubo | 2003-04-22 |
| 6361708 | Method and apparatus for polishing a metal film | Akira Kubo | 2002-03-26 |
| 6235071 | Chemical mechanical polishing method for highly accurate in-plane uniformity in polishing rate over position | Yasuaki Tsuchiya | 2001-05-22 |
| 6110014 | Method and apparatus polishing wafer for extended effective area of wafer | — | 2000-08-29 |
| 6054383 | Fabrication method of semiconductor device | Tetsuya Homma | 2000-04-25 |
| 5904558 | Fabrication process of semiconductor device | — | 1999-05-18 |
| 5607880 | Method of fabricating multilevel interconnections in a semiconductor integrated circuit | Tetsuya Homma | 1997-03-04 |
| 5491108 | Method of producing semiconductor integrated circuit device having interplayer insulating film covering substrate | Tetsuya Homma, Yukinobu Murao, Takaho Tanigawa, Hiroki Koga | 1996-02-13 |
| 5420075 | Forming multi-layered interconnections with fluorine compound treatment permitting selective deposition of insulator | Tetsuya Homma | 1995-05-30 |
| 5332694 | Process for manufacturing a semiconductor device | — | 1994-07-26 |
| 4552633 | Fine particulate for use in clinical testing and a process for producing thereof | Minoru Kumakura, Isao Kaetsu, Masakazu Adachi | 1985-11-12 |