Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615498 | Method of manufacturing a semiconductor device | Yoichi Sasaki, Koichi Ohto, Noboru Morita, Tatsuya Usami | 2009-11-10 |
| 7341937 | Semiconductor device and method of manufacturing same | Koji Arita, Masayoshi Tagami | 2008-03-11 |
| 7180191 | Semiconductor device and method of manufacturing a semiconductor device | Yoichi Sasaki, Koichi Ohto, Noboru Morita, Tatsuya Usami | 2007-02-20 |
| 6927495 | Semiconductor device and method of manufacturing same | Koji Arita, Masayoshi Tagami | 2005-08-09 |
| 6319844 | Method of manufacturing semiconductor device with via holes reaching interconnect layers having different top-surface widths | Tatsuya Usami | 2001-11-20 |
| 5937300 | Semiconductor apparatus and fabrication method thereof | Makoto Sekine, Ken Inoue | 1999-08-10 |
| 5846331 | Plasma processing apparatus | — | 1998-12-08 |
| 5810932 | Plasma generating apparatus used for fabrication of semiconductor device | Yasuhiko Ueda, Hideaki Kawamoto | 1998-09-22 |
| 5792710 | Method for selectively etching polycide layer | Kazuyoshi Yoshida, Eiji Ikawa | 1998-08-11 |
| 5690781 | Plasma processing apparatus for manufacture of semiconductor devices | Kazuyoshi Yoshida | 1997-11-25 |
| 5645683 | Etching method for etching a semiconductor substrate having a silicide layer and a polysilicon layer | — | 1997-07-08 |
| 5407862 | Method for manufacturing fine-structured stacked connection layer | — | 1995-04-18 |
| 5340769 | Method for manufacturing semiconductor device having groove-structured isolation | — | 1994-08-23 |
| 5246888 | Method of preventing corrosion of aluminum alloys | — | 1993-09-21 |