Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418866 | Gas treatment method | — | 2016-08-16 |
| 9384993 | Oxide etching method | — | 2016-07-05 |
| 7326650 | Method of etching dual damascene structure | Yoshihide Kihara, Shin Okamoto, Koichiro Inazawa | 2008-02-05 |
| 6670276 | Plasma processing method | Vaidyanathan Balasubramaniam, Koichiro Inazawa | 2003-12-30 |
| 6642149 | Plasma processing method | Tsuyoshi Ono, Kouichiro Inazawa, Makoto Sekine, Itsuko Sakai, Yukimasa Yoshida | 2003-11-04 |
| 6089181 | Plasma processing apparatus | Tsuyoshi Ono, Kouichiro Inazawa | 2000-07-18 |