Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5302240 | Method of manufacturing semiconductor device | Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano +3 more | 1994-04-12 |
| 5259923 | Dry etching method | Keiji Horioka, Haruo Okano, Masao Ito, Masahito Hiratsuka, Yoshio Ishikawa | 1993-11-09 |
| 5240554 | Method of manufacturing semiconductor device | Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano | 1993-08-31 |
| 5188706 | Method of manufacturing an X-ray exposure mask and device for controlling the internal stress of thin films | Masamitsu Itoh | 1993-02-23 |