Issued Patents All Time
Showing 26–50 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8961888 | Plasma generator | Hioryuki Kano | 2015-02-24 |
| 8758637 | Apparatus and method of removing coating of line-shaped body using plasma | Takeshi Hirayama, Imei Shu, Sadayuki Toda, Hisashi Koaizawa | 2014-06-24 |
| 8638034 | Multi-micro hollow cathode light source and atomic absorption sepctrometer | Masafumi Ito, Takayuki Ohta, Hiroyuki Kano, Koji Yamakawa | 2014-01-28 |
| 8610353 | Plasma generating apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Hidenori Miyoshi, Hirotaka Toyoda, Makoto Sekine | 2013-12-17 |
| 8558169 | Sample substrate for laser desorption ionization-mass spectrometry, and method and device both using the same for laser desorption ionization-mass spectrometry | Hiroaki Sato, Yasutake Toyoshima, Mineo Hiramatsu | 2013-10-15 |
| 8551657 | Negative electrode for lithium secondary battery, method for preparing the negative electrode, lithium secondary battery having the negative electrode, and vehicle having the lithium secondary battery | Satoshi Yoshida, Yuichiro Hama, Mineo Hiramatsu, Hiroyuki Kano | 2013-10-08 |
| 8351039 | Spectroscopy method and spectroscope | Masafumi Ito, Norihiko Nishizawa, Toshio Goto, Hiroyuki Kano | 2013-01-08 |
| 8349142 | Method for producing graphene | Hiroyuki Kano | 2013-01-08 |
| 8310673 | Light source | Hiroyuki Kano, Shoji Den | 2012-11-13 |
| 8119530 | Pattern forming method and semiconductor device manufacturing method | Yoshiro Kabe, Toshihiko Shiozawa, Junichi Kitagawa | 2012-02-21 |
| 8110248 | Fuel cell structure and method of manufacturing same | Mineo Hiramatsu, Hiroyuki Kano, Satoshi Yoshida, Yukihisa Katayama, Toru Sugiyama | 2012-02-07 |
| 7989364 | Plasma oxidation processing method | Toshihiko Shiozawa, Yoshiro Kabe, Junichi Kitagawa | 2011-08-02 |
| 7923170 | Fuel cell separator with a vapor-phase grown carbon-based porous material of nanosize structure | Mineo Hiramatsu, Hiroyuki Kano, Yukihisa Katayama, Toru Sugiyama, Satoshi Yoshida | 2011-04-12 |
| 7875199 | Radical generating method, etching method and apparatus for use in these methods | Toshio Goto, Mikio Nagai | 2011-01-25 |
| 7855788 | Spectroscopy method and spectroscope | Masafumi Ito, Norihiko Nishizawa, Toshio Goto, Hiroyuki Kano | 2010-12-21 |
| 7710562 | Atomic analyzer | Masafumi Ito | 2010-05-04 |
| 7632379 | Plasma source and plasma processing apparatus | Toshio Goto, Nobuo Ishii, Shoji Den | 2009-12-15 |
| 7556970 | Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage medium | Kazuhiro Kubota | 2009-07-07 |
| 7517771 | Method for manufacturing semiconductor device having trench | Takumi Shibata, Shoichi Yamauchi, Hitoshi Yamaguchi | 2009-04-14 |
| 7393460 | Plasma processing method and plasma processing apparatus | Kazuhiro Kubota | 2008-07-01 |
| 6501082 | Plasma deposition apparatus and method with controller | Toshio Goto, Masafumi Ito, Nobuo Ishii, Satoru Kawakami | 2002-12-31 |
| 5980999 | Method of manufacturing thin film and method for performing precise working by radical control and apparatus for carrying out such methods | Toshio Goto, Mineo Hiramatsu, Masahito Nawata | 1999-11-09 |
| 5707487 | Method of manufacturing semiconductor device | Hiroyuki Yano, Keiji Horioka, Haruo Okano | 1998-01-13 |
| 5445710 | Method of manufacturing semiconductor device | Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano +3 more | 1995-08-29 |
| 5411631 | Dry etching method | Haruo Okano, Michishige Aoyama, Masao Ito, Kei Hattori, Fumihiko Higuchi +1 more | 1995-05-02 |