Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5980999 | Method of manufacturing thin film and method for performing precise working by radical control and apparatus for carrying out such methods | Toshio Goto, Masaru Hori, Mineo Hiramatsu | 1999-11-09 |