Issued Patents All Time
Showing 1–25 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9127346 | Sputtering target material | Koichi Hasegawa | 2015-09-08 |
| 8858877 | Sputtering target material | Koichi Hasegawa | 2014-10-14 |
| 8252127 | Sputtering target material | Koichi Hasegawa | 2012-08-28 |
| 7959746 | Sputtering target material | Koichi Hasegawa | 2011-06-14 |
| 7807019 | Radial antenna and plasma processing apparatus comprising the same | — | 2010-10-05 |
| 7632379 | Plasma source and plasma processing apparatus | Toshio Goto, Masaru Hori, Shoji Den | 2009-12-15 |
| RE40963 | Method for plasma processing by shaping an induced electric field | Jiro Hata | 2009-11-10 |
| 7481904 | Plasma device | — | 2009-01-27 |
| 7465424 | Sputtering target material | Koichi Hasegawa, Tomoyoshi Asaki | 2008-12-16 |
| 7457721 | Method and apparatus for measuring small displacement | Mitsuo Takeda, Wei-Chieh Wang, Yoko Miyamoto | 2008-11-25 |
| 7416330 | Method and apparatus for measuring temperature of substrate | Masafumi Ito, Yasuyuki Okamura, Tatsuo Shiina, Tomohiro Suzuki, Chishio Koshimizu | 2008-08-26 |
| 7395779 | Plasma processing apparatus | Kibatsu Shinohara, Yasuyoshi Yasaka | 2008-07-08 |
| 7305934 | Plasma treatment apparatus and plasma generation method | — | 2007-12-11 |
| 7302910 | Plasma apparatus and production method thereof | — | 2007-12-04 |
| 7296533 | Radial antenna and plasma device using it | Kibatsu Shinohara | 2007-11-20 |
| 7243610 | Plasma device and plasma generating method | Makoto Ando, Masaharu Takahashi | 2007-07-17 |
| 7186314 | Plasma processor and plasma processing method | Kibatsu Shinohara | 2007-03-06 |
| 7071442 | Plasma processing apparatus | Kibatsu Shinohara | 2006-07-04 |
| 7023393 | Slot array antenna and plasma processing apparatus | Makoto Ando, Masaharu Takahashi | 2006-04-04 |
| 6967622 | Plasma device and plasma generating method | Makoto Ando | 2005-11-22 |
| 6953908 | Plasma processing apparatus | Yasuyoshi Yasaka | 2005-10-11 |
| 6911617 | Plasma device and plasma generating method | Makoto Ando | 2005-06-28 |
| 6910440 | Apparatus for plasma processing | Yasuyoshi Yasaka, Kibatsu Shinohara | 2005-06-28 |
| 6847003 | Plasma processing apparatus | Kibatsu Shinohara | 2005-01-25 |
| 6823816 | Plasma processing system | Yasuyoshi Yasaka | 2004-11-30 |