Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10577719 | Radical generator and molecular beam epitaxy apparatus | Masaru Hori, Hiroshi Amano, Hiroyuki Kano, Koji Yamakawa | 2020-03-03 |
| 9447518 | Radical generator and molecular beam epitaxy apparatus | Masaru Hori, Hiroshi Amano, Hiroyuki Kano, Koji Yamakawa | 2016-09-20 |
| 8310673 | Light source | Masaru Hori, Hiroyuki Kano | 2012-11-13 |
| 7782463 | Particle density measuring probe and particle density measuring equipment | Masanu Hori, Seigo Takashima, Hiroyuki Kano | 2010-08-24 |
| 7632379 | Plasma source and plasma processing apparatus | Toshio Goto, Masaru Hori, Nobuo Ishii | 2009-12-15 |