Issued Patents All Time
Showing 26–50 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796268 | Microwave plasma processing system | — | 2004-09-28 |
| 6713968 | Plasma processing apparatus | Yasuyoshi Yasaka | 2004-03-30 |
| 6695948 | Plasma processing apparatus | Yasuyoshi Yasaka | 2004-02-24 |
| 6670741 | Plasma processing apparatus with annular waveguide | — | 2003-12-30 |
| 6657151 | Plasma processing device | Kibatsu Shinohara | 2003-12-02 |
| 6646224 | Plasma-assisted processing system and plasma-assisted processing method | Yasuyoshi Yasaka, Makoto Ando, Naohisa Goto | 2003-11-11 |
| 6622650 | Plasma processing apparatus | Yasuyoshi Yasaka | 2003-09-23 |
| 6528752 | Plasma processing apparatus and plasma processing method | Yasuyoshi Yasaka, Makoto Ando, Naohisa Goto | 2003-03-04 |
| 6527909 | Plasma processing apparatus | Yasuyoshi Yasaka | 2003-03-04 |
| 6501082 | Plasma deposition apparatus and method with controller | Toshio Goto, Masaru Hori, Masafumi Ito, Satoru Kawakami | 2002-12-31 |
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoshinobu Kawai, Yoko Ueda, Satoru Kawakami | 2002-09-17 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Satoru Kawakami, Yoshinobu Kawai, Yoko Ueda | 2002-08-13 |
| 6433298 | Plasma processing apparatus | — | 2002-08-13 |
| 6404134 | Plasma processing system | — | 2002-06-11 |
| 6390018 | Microwave plasma treatment apparatus | — | 2002-05-21 |
| 6350347 | Plasma processing apparatus | Jiro Hata | 2002-02-26 |
| 6347602 | Plasma processing apparatus | Naohisa Goto, Makoto Ando | 2002-02-19 |
| 6322662 | Plasma treatment system | Yasuo Kobayashi, Tamotsu Morimoto, Makoto Ando, Naohisa Goto | 2001-11-27 |
| 6311638 | Plasma processing method and apparatus | Yasuyoshi Yasaka, Makoto Ando, Naohisa Goto | 2001-11-06 |
| 6265031 | Method for plasma processing by shaping an induced electric field | Jiro Hata | 2001-07-24 |
| 6136140 | Plasma processing apparatus | Jiro Hata | 2000-10-24 |
| 6136139 | Plasma processing apparatus | Jiro Hata | 2000-10-24 |
| 6066568 | Plasma treatment method and system | Yoshinobu Kawai, Yoko Ueda, Satoru Kawakami, Hideaki Amano | 2000-05-23 |
| 6024827 | Plasma processing apparatus | — | 2000-02-15 |
| 5938883 | Plasma processing apparatus | Jiro Hata | 1999-08-17 |