Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452400 | Method of measuring negative ion density of plasma and plasma processing method and apparatus for carrying out the same | Yoko Ueda, Nobuo Ishii, Satoru Kawakami | 2002-09-17 |
| 6431114 | Method and apparatus for plasma processing | Issei Imahashi, Nobuo Ishii, Satoru Kawakami, Yoko Ueda | 2002-08-13 |
| 6066568 | Plasma treatment method and system | Yoko Ueda, Nobuo Ishii, Satoru Kawakami, Hideaki Amano | 2000-05-23 |
| 5172083 | Microwave plasma processing apparatus | Ryota Hidaka, Ryuji Koga, Toru Yamaguchi | 1992-12-15 |