Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5172083 | Microwave plasma processing apparatus | Yoshinobu Kawai, Ryuji Koga, Toru Yamaguchi | 1992-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5172083 | Microwave plasma processing apparatus | Yoshinobu Kawai, Ryuji Koga, Toru Yamaguchi | 1992-12-15 |