Issued Patents All Time
Showing 51–67 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5874706 | Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field | Kibatsu Shinohara | 1999-02-23 |
| 5851298 | Susceptor structure for mounting processing object thereon | — | 1998-12-22 |
| 5795429 | Plasma processing apparatus | Jiro Hata | 1998-08-18 |
| 5783492 | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Kimihiro Higuchi, Chishio Koshimizu, Ryoichiro Koshi, Teruo Iwata | 1998-07-21 |
| 5701228 | Stage system or device | — | 1997-12-23 |
| 5698036 | Plasma processing apparatus | Yasuo Kobayashi, Naohisa Goto, Makoto Ando, Junichi Takada, Yasuhiro Horike | 1997-12-16 |
| 5685942 | Plasma processing apparatus and method | — | 1997-11-11 |
| 5683537 | Plasma processing apparatus | — | 1997-11-04 |
| 5637961 | Concentric rings with different RF energies applied thereto | Kibatsu Shinohara | 1997-06-10 |
| 5571366 | Plasma processing apparatus | Jiro Hata, Chishio Koshimizu, Yoshifumi Tahara, Hiroshi Nishikawa, Isei Imahashi | 1996-11-05 |
| 5529657 | Plasma processing apparatus | — | 1996-06-25 |
| 5455082 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Towl Ikeda, Hiroaki Saeki | 1995-10-03 |
| 5374327 | Plasma processing method | Issei Imahashi, Chishio Koshimizu | 1994-12-20 |
| 5342472 | Plasma processing apparatus | Issei Imahashi | 1994-08-30 |
| 5314541 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Teruo Iwata, Towl Ikeda, Hiroaki Saeki | 1994-05-24 |
| 5173641 | Plasma generating apparatus | Issei Imahashi | 1992-12-22 |
| 4749912 | Ion-producing apparatus | Tamio Hara, Manabu Hamagaki, Yoshinobu Aoyagi, Susumu Namba, Naoki Takayama +1 more | 1988-06-07 |