Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5828225 | Semiconductor wafer probing apparatus | Tadashi Obikane, Eiji Hayashi | 1998-10-27 |
| 5783492 | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Kimihiro Higuchi, Chishio Koshimizu, Teruo Iwata, Nobuo Ishii | 1998-07-21 |