| 7395779 |
Plasma processing apparatus |
Nobuo Ishii, Kibatsu Shinohara |
2008-07-08 |
| 6953908 |
Plasma processing apparatus |
Nobuo Ishii |
2005-10-11 |
| 6910440 |
Apparatus for plasma processing |
Nobuo Ishii, Kibatsu Shinohara |
2005-06-28 |
| 6823816 |
Plasma processing system |
Nobuo Ishii |
2004-11-30 |
| 6713968 |
Plasma processing apparatus |
Nobuo Ishii |
2004-03-30 |
| 6695948 |
Plasma processing apparatus |
Nobuo Ishii |
2004-02-24 |
| 6646224 |
Plasma-assisted processing system and plasma-assisted processing method |
Nobuo Ishii, Makoto Ando, Naohisa Goto |
2003-11-11 |
| 6622650 |
Plasma processing apparatus |
Nobuo Ishii |
2003-09-23 |
| 6528752 |
Plasma processing apparatus and plasma processing method |
Nobuo Ishii, Makoto Ando, Naohisa Goto |
2003-03-04 |
| 6527909 |
Plasma processing apparatus |
Nobuo Ishii |
2003-03-04 |
| 6311638 |
Plasma processing method and apparatus |
Nobuo Ishii, Makoto Ando, Naohisa Goto |
2001-11-06 |