Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12398324 | Methods for controlling the pitch of self-assembled ionic liquid crystal (ILC) structures | Dipak Aryal, Kate Abel, Takeo Nakano | 2025-08-26 |
| 10910229 | Substrate treatment method | Koichi Nagakura, Shuichiro Uda, Takeshi Saito | 2021-02-02 |
| 10790152 | Method for etching multilayer film | Takuya Kubo, Song yun Kang | 2020-09-29 |
| 9947864 | Method for etching object to be processed | Song yun Kang | 2018-04-17 |
| 9911596 | Modification processing method and method of manufacturing semiconductor device | Yusuke Muraki, Kazuaki Nishimura | 2018-03-06 |
| 9443724 | Modification processing method and method of manufacturing semiconductor device | Yusuke Muraki, Kazuaki Nishimura | 2016-09-13 |
| 9025248 | Antireflection stack | Kensuke Fujii, Kouji Satou, Kouta Hori | 2015-05-05 |
| 8574446 | Apparatus and method for plasma processing | Takahiro Murakami | 2013-11-05 |
| 8040062 | Electroconductive laminate, and electromagnetic wave shielding film and protective plate for plasma display | Hideaki Miyazawa, Masahiro Fusen, Koichi Kanda, Susumu Nakagama | 2011-10-18 |
| 7771850 | Electromagnetic wave shielding laminate and display device employing it | Tohru Yanagisawa | 2010-08-10 |
| 7740946 | Electroconductive laminate, and electromagnetic wave shielding film for plasma display and protective plate for plasma display | Masato Kawasaki, Makoto Hiramoto, Koichi Kanda, Susumu Nakagama | 2010-06-22 |
| 6812151 | Method of etching | Kenichi Nanbu | 2004-11-02 |
| 6793834 | Apparatus for and method of processing an object to be processed | — | 2004-09-21 |
| 6514377 | Apparatus for and method of processing an object to be processed | — | 2003-02-04 |
| 6322662 | Plasma treatment system | Nobuo Ishii, Yasuo Kobayashi, Makoto Ando, Naohisa Goto | 2001-11-27 |
| 5567152 | Heat processing apparatus | — | 1996-10-22 |