Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11832524 | Method for processing substrate, processing apparatus, and processing system | Takuya Kubo | 2023-11-28 |
| 11171286 | Method of processing workpiece | Takuya Kubo | 2021-11-09 |
| 11152564 | Substrate manufacturing method and processing system | Takuya Kubo | 2021-10-19 |
| 10944051 | Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method | Takuya Kubo, Keiichi Shimoda, Tetsuya Ohishi | 2021-03-09 |
| 10790152 | Method for etching multilayer film | Takuya Kubo, Tamotsu Morimoto | 2020-09-29 |
| 10403814 | Method of cleaning and method of plasma processing | Takuya Kubo, Keiichi Shimoda, Tetsuya Ohishi | 2019-09-03 |
| 10181559 | Etching method | Takuya Kubo | 2019-01-15 |
| 9947864 | Method for etching object to be processed | Tamotsu Morimoto | 2018-04-17 |
| 9611545 | ZnO film production system and production method using ZnO film production system having heating units and control device | Yoshinao Kumagai, Akinori Koukitu | 2017-04-04 |
| 8753988 | Starting material for use in forming silicon oxide film and method for forming silicon oxide film using same | — | 2014-06-17 |
| 7763551 | RLSA CVD deposition control using halogen gas for hydrogen scavenging | Jozef Brcka, Toshio Nakanishi, Peter L. G. Ventzek, Minoru Honda, Masayuki Kohno | 2010-07-27 |
| 7348129 | Electron beam processing method and apparatus | Kazuyuki Mitsuoka, Minoru Honda, Yusuke Saito | 2008-03-25 |