Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251052 | Plasma processing method and plasma processing apparatus | Naotsugu Hoshi, Shinji Higashitsutsumi | 2022-02-15 |
| 10944051 | Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method | Takuya Kubo, Song yun Kang, Keiichi Shimoda | 2021-03-09 |
| 10403814 | Method of cleaning and method of plasma processing | Takuya Kubo, Song yun Kang, Keiichi Shimoda | 2019-09-03 |
| 9139901 | Plasma processing method | Akitaka Shimizu | 2015-09-22 |
| 8652309 | Sputtering apparatus and electronic device manufacturing method | Yu FUJIMOTO | 2014-02-18 |
| 6071464 | Process for modifying surfaces of hard materials and cutting tools | Mitsuhiro Funaki, Mitsuo Kuwabara, Kazuhito Hiraga | 2000-06-06 |
| 5945167 | Method of manufacturing composite material | Mitsuo Kuwabara, Mitsuhiro Funaki, Kazuhito Hiraga | 1999-08-31 |
| 5704994 | Method of case-hardening shaped object | Mitsuo Kuwabara, Mitsuhiro Funaki, Kazuhito Hiraga | 1998-01-06 |