Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372761 | Plasma oxidation processing method, plasma processing apparatus and storage medium | Yoshiro Kabe, Takashi Kobayashi, Junichi Kitagawa | 2013-02-12 |
| 8119530 | Pattern forming method and semiconductor device manufacturing method | Masaru Hori, Yoshiro Kabe, Junichi Kitagawa | 2012-02-21 |
| 8043979 | Plasma oxidizing method, storage medium, and plasma processing apparatus | Takashi Kobayashi, Junichi Kitagawa, Yoshiro Kabe | 2011-10-25 |
| 8003484 | Method for forming silicon oxide film, plasma processing apparatus and storage medium | Yoshiro Kabe, Takashi Kobayashi, Junichi Kitagawa | 2011-08-23 |
| 7989364 | Plasma oxidation processing method | Masaru Hori, Yoshiro Kabe, Junichi Kitagawa | 2011-08-02 |
| 7910495 | Plasma oxidizing method, plasma processing apparatus, and storage medium | Yoshiro Kabe, Takashi Kobayashi, Hikaru Adachi, Junichi Kitagawa, Nobuhiko Yamamoto | 2011-03-22 |