Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5271788 | Plasma processing apparatus | Makoto Hasegawa, Takaya Matsushita, Keiji Horioka, Isahiro Hasegawa, Toshihisa Nozawa +2 more | 1993-12-21 |
| 5259923 | Dry etching method | Masaru Hori, Keiji Horioka, Haruo Okano, Masao Ito, Yoshio Ishikawa | 1993-11-09 |