Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11451214 | Control device and active filter apparatus | Masatoshi Takeda, Shinichi Ogusa, Akihiro Matsuda | 2022-09-20 |
| 9412567 | Plasma monitoring method and plasma monitoring system | Seiji Samukawa | 2016-08-09 |
| 9005461 | Plasma monitoring method and plasma monitoring system | Seiji Samukawa | 2015-04-14 |
| 8427168 | Plasma monitoring method | Seiji Samukawa | 2013-04-23 |
| 8419892 | Plasma process detecting sensor | — | 2013-04-16 |
| 7807518 | Semiconductor memory device and manufacturing method thereof | — | 2010-10-05 |