Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7000565 | Plasma surface treatment system and plasma surface treatment method | Seiji Samukawa | 2006-02-21 |
| 6723652 | Dry etching method and method of manufacturing semiconductor apparatus | — | 2004-04-20 |
| 5880035 | Dry etching method | — | 1999-03-09 |
| 5698072 | Dry etching method | — | 1997-12-16 |
| 5660681 | Method for removing sidewall protective film | Tetsuya Tatsumi | 1997-08-26 |