Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5565738 | Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber | Seiji Samukawa, Kibatsu Shinohara, Tsutomu Tsukada, Yukito Nakagawa | 1996-10-15 |