Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7392760 | Microwave-excited plasma processing apparatus | Maiko Yoshida, Kohta Kusaba, Kibatsu Shinohara, Munekazu Matsuo, Kazuhiro Watanabe | 2008-07-01 |
| 6451682 | Method of forming interconnect film | Takao Fujikawa, Makoto Kadoguchi, Kohei Suzuki, Yasushi Mizusawa, Tomoyasu Kondou | 2002-09-17 |