Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7392760 | Microwave-excited plasma processing apparatus | Yoji Taguchi, Maiko Yoshida, Kohta Kusaba, Kibatsu Shinohara, Kazuhiro Watanabe | 2008-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7392760 | Microwave-excited plasma processing apparatus | Yoji Taguchi, Maiko Yoshida, Kohta Kusaba, Kibatsu Shinohara, Kazuhiro Watanabe | 2008-07-01 |