Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8002947 | Plasma treatment system and cleaning method of the same | Yoichiro Numasawa | 2011-08-23 |
| 7913752 | Cooling device for vacuum treatment device | Masashi Ueda, Shusaku Yamasaki, Kazuo Miyoshi, Hiroyuki Otsuka | 2011-03-29 |
| 7530359 | Plasma treatment system and cleaning method of the same | Yoichiro Numasawa | 2009-05-12 |
| 7312418 | Semiconductor thin film forming system | Hiroshi Tanabe, Tomoyuki Akashi | 2007-12-25 |
| 6861614 | S system for the formation of a silicon thin film and a semiconductor-insulating film interface | Hiroshi Tanabe, Tomoyuki Akashi | 2005-03-01 |
| 6664496 | Plasma processing system | Shinya Hasegawa, Yoichiro Numasawa, Yukito Nakagawa | 2003-12-16 |
| 6503816 | Thin film formation by inductively-coupled plasma CVD process | Norikazu Ito, Akihisa Matsuda, Michio Kondo | 2003-01-07 |
| 6189485 | Plasma CVD apparatus suitable for manufacturing solar cell and the like | Akihisa Matsuda, Hideo Yamagishi, Masataka Kondo, Takashi Hayakawa | 2001-02-20 |
| 5437895 | Plasma CVD process for forming amorphous silicon thin film | Akira Kodama, Massashi Ueda | 1995-08-01 |