Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7312418 | Semiconductor thin film forming system | Hiroshi Tanabe, Yoshimi Watabe | 2007-12-25 |
| 6861614 | S system for the formation of a silicon thin film and a semiconductor-insulating film interface | Hiroshi Tanabe, Yoshimi Watabe | 2005-03-01 |
| 6680460 | Apparatus for producing a semiconductor thin film | Hiromichi Takaoka | 2004-01-20 |