Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4950956 | Plasma processing apparatus | Kiyoshi Hoshino, Katsumi Ukai, Yoichi Ino, Toshio Adachi, Tsutomu Tsukada | 1990-08-21 |
| 4919783 | Apparatus for processing an object by gas plasma with a reduced damage | Hideo Mito, Yukito Nakagawa, Atsushi Sekiguchi | 1990-04-24 |
| 4638209 | Ion beam generating apparatus | Takao Kato | 1987-01-20 |