Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893532 | Method and apparatus for processing fine particle dust in plasma | Noriyoshi Sato, Giichiro UCHIDA | 2005-05-17 |
| 6835279 | Plasma generation apparatus | Yunlong Li, Noriyoshi Sato | 2004-12-28 |
| 6380684 | Plasma generating apparatus and semiconductor manufacturing method | Yunlong Li, Masanobu Sato, Yoshio Tominaga, Noriyoshi Sato | 2002-04-30 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa, Yoshio Tominaga +2 more | 2002-04-23 |
| 6238512 | Plasma generation apparatus | Yunlong Li, Noriyoshi Sato | 2001-05-29 |