Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084989 | Curvature adjustment method for stator blade segment, method for manufacturing stationary body of axial-flow rotary machine, and curvature adjustment jig for stator blade segment | Shin Kato, Shingo Yamasue, Ryota Chaki, Hirokazu Azuma | 2024-09-10 |
| 6380684 | Plasma generating apparatus and semiconductor manufacturing method | Yunlong Li, Masanobu Sato, Noriyoshi Sato, Satoru Iizuka | 2002-04-30 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Satoru Iizuka, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa +2 more | 2002-04-23 |