Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810748 | Ion gun and vacuum processing apparatus | Reiji Sakamoto, Hiroshi Yakushiji | 2023-11-07 |
| 11521822 | Ion gun and vacuum processing apparatus | — | 2022-12-06 |
| 8778151 | Plasma processing apparatus | Masayoshi Ikeda, Yo Tanaka | 2014-07-15 |