Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810748 | Ion gun and vacuum processing apparatus | Tsutomu Hiroishi, Hiroshi Yakushiji | 2023-11-07 |
| 10738380 | Deposition apparatus | Naoyuki Nozawa, Nobuo Matsuki, Masahito Ishihara | 2020-08-11 |