Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10738380 | Deposition apparatus | Nobuo Matsuki, Reiji Sakamoto, Masahito Ishihara | 2020-08-11 |
| 9896760 | Deposition apparatus | Hidekazu Nishimura | 2018-02-20 |
| 9346171 | Substrate transport apparatus, and system and method for manufacturing electronic device | Kazuhito Watanabe, Yukihito Tashiro, Satoshi Nakamura, Daisuke Kobinata, Toshiaki Sasaki | 2016-05-24 |
| 8912697 | Vacuum actuator including a stator forming a part of a vacuum partition wall | Kazuhito Watanabe, Yukihito Tashiro, Daisuke Kobinata, Hideo Mano | 2014-12-16 |
| 8534975 | Substrate transport apparatus and method for manufacturing magnetic recording medium | Itaru Hagiwara | 2013-09-17 |
| 7770714 | Transfer apparatus | Hiroshi Sone, Satoshi Hitomi, Yoshiro Hasegawa | 2010-08-10 |
| 6660089 | Substrate support mechanism and substrate rotation device | Terushige Takeyama, Miho Sakai | 2003-12-09 |
| 6202592 | Substrate holder | Yoshiro Hasegawa | 2001-03-20 |
| 6030455 | Substrate holder | Yoshiro Hasegawa | 2000-02-29 |
| 5976255 | Substrate holder for reducing non-uniform film characteristics resulting from support structures | Kurita Takaki, Yoshiro Hasegawa | 1999-11-02 |