Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660089 | Substrate support mechanism and substrate rotation device | Naoyuki Nozawa, Miho Sakai | 2003-12-09 |
| 6561343 | Magnetic carrying device | Nobuhito Miyauchi, Takashi Shiba | 2003-05-13 |
| 6461484 | Sputtering device | Kamikura Yo, Naoki Yamada, Shuji Kumagai | 2002-10-08 |
| 6319373 | Substrate transfer apparatus of substrate processing system | Nobuhito Miyauchi, Takashi Shiba | 2001-11-20 |