Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316555 | Cold cathode ionization vacuum gauge and inner wall protection member | Itaru Enomoto | 2016-04-19 |
| 8912697 | Vacuum actuator including a stator forming a part of a vacuum partition wall | Kazuhito Watanabe, Yukihito Tashiro, Naoyuki Nozawa, Daisuke Kobinata | 2014-12-16 |
| 8384391 | Cold cathode ionization vacuum gauge, vacuum processing apparatus having the same, discharge starting auxiliary electrode used for the same, and method of measuring pressure using the same | Yohsuke Kawasaki | 2013-02-26 |