Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10738380 | Deposition apparatus | Naoyuki Nozawa, Nobuo Matsuki, Reiji Sakamoto | 2020-08-11 |
| 7848077 | Electrostatic chuck device | Shigeru Mizuno, Sunil Wickramanayaka, Naoki Miyazaki | 2010-12-07 |
| 7791857 | Electrostatic chuck device | Shigeru Mizuno, Sunil Wickramanayaka, Naoki Miyazaki | 2010-09-07 |
| 7724493 | Electrostatic chuck device | Shigeru Mizuno, Sunil Wickramanayaka, Naoki Miyazaki | 2010-05-25 |
| 7623334 | Electrostatic chuck device | Shigeru Mizuno, Sunil Wickramanayaka, Naoki Miyazaki | 2009-11-24 |
| 7159537 | Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems | Sunil Wickramanayaka, Yoshikazu Nozaki, Hiroshi Doi | 2007-01-09 |
| 7019263 | Substrate heating apparatus and multi-chamber substrate processing system | — | 2006-03-28 |
| 6129046 | Substrate processing apparatus | Shigeru Mizuno, Kazuhito Watanabe, Nobuyuki Takahashi | 2000-10-10 |
| 6070552 | Substrate processing apparatus | Shigeru Mizuno, Yoichiro Numasawa, Nobuyuki Takahashi | 2000-06-06 |
| 5956616 | Method of depositing thin films by plasma-enhanced chemical vapor deposition | Shigeru Mizuno, Manabu Tagami, Shinya Hasegawa, Yoichiro Numasawa, Kiyoshi Nashimoto +1 more | 1999-09-21 |
| 5944968 | Sputtering apparatus | Masahiko Kobayashi, Hajime Sahase, Nobuyuki Takahashi | 1999-08-31 |
| 5925227 | Multichamber sputtering apparatus | Masahiko Kobayashi, Nobuyuki Takahashi | 1999-07-20 |
| 5624499 | CVD apparatus | Shigeru Mizuno, Manabu Tagami, Hajime Sahase, Nobuyuki Takahashi | 1997-04-29 |
| 4768268 | Method for manufacturing a single-piece type valve sleeve | Masahito Iwata | 1988-09-06 |
| 4617883 | Pivot members for a cam follower of valve mechanism for internal combustion engine | Takahiro Okuyama, Susumu Toki | 1986-10-21 |