Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872289 | Thin film fabrication method and thin film fabrication apparatus | Shigeru Mizuno, Makoto Satou, Hideki Satou | 2005-03-29 |
| 6348238 | Thin film fabrication method and thin film fabrication apparatus | Shigeru Mizuno, Makoto Satou, Hideki Satou | 2002-02-19 |
| 5956616 | Method of depositing thin films by plasma-enhanced chemical vapor deposition | Shigeru Mizuno, Shinya Hasegawa, Yoichiro Numasawa, Masahito Ishihara, Kiyoshi Nashimoto +1 more | 1999-09-21 |
| 5893962 | Electrode unit for in-situ cleaning in thermal CVD apparatus | Shigeru Mizuno, Takanori Yoshimura | 1999-04-13 |
| 5676758 | CVD apparatus | Shinya Hasegawa, Shigeru Mizuno, Kazuhito Watanabe, Nobuyuki Takahashi, Takanori Yoshimura +1 more | 1997-10-14 |
| 5624499 | CVD apparatus | Shigeru Mizuno, Masahito Ishihara, Hajime Sahase, Nobuyuki Takahashi | 1997-04-29 |