Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6059985 | Method of processing a substrate and apparatus for the method | Shigeru Mizuno, Shinya Hasegawa, Yoichiro Numasawa, Nobuyuki Takahashi | 2000-05-09 |
| 5893962 | Electrode unit for in-situ cleaning in thermal CVD apparatus | Shigeru Mizuno, Manabu Tagami | 1999-04-13 |
| 5766363 | Heater for CVD apparatus | Shigeru Mizuno, Kazuhito Watanabe, Nobuyuki Takahashi | 1998-06-16 |
| 5728629 | Process for preventing deposition on inner surfaces of CVD reactor | Shigeru Mizuno, Yoshihiro Katsumata, Nobuyoki Takahashi | 1998-03-17 |
| 5676758 | CVD apparatus | Shinya Hasegawa, Shigeru Mizuno, Kazuhito Watanabe, Nobuyuki Takahashi, Manabu Tagami +1 more | 1997-10-14 |