Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6785115 | Electrostatic chuck and substrate processing apparatus | Hideyoshi Tsuruta, Satoru Yamada, Naoki Miyazaki | 2004-08-31 |
| 5956616 | Method of depositing thin films by plasma-enhanced chemical vapor deposition | Shigeru Mizuno, Manabu Tagami, Shinya Hasegawa, Yoichiro Numasawa, Masahito Ishihara +1 more | 1999-09-21 |
| 5334251 | Method of and apparatus for controlling temperature in the processing of a substrate | — | 1994-08-02 |
| 5147498 | Apparatus for controlling temperature in the processing of a substrate | — | 1992-09-15 |