Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7849815 | Plasma processing apparatus | Tomoaki Osada | 2010-12-14 |
| 7457238 | Transmission system with congestion state-based flow control | Akikazu Maehara, Hiroo Uchiyama, Etsuko YAMASHITA | 2008-11-25 |
| 7164571 | Wafer stage with a magnet | Sunil Wickramanayaka | 2007-01-16 |
| 7159537 | Device for fixing a gas showerhead or target plate to an electrode in plasma processing systems | Sunil Wickramanayaka, Masahito Ishihara, Hiroshi Doi | 2007-01-09 |