Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12241155 | Method for forming insulation film | — | 2025-03-04 |
| 11850827 | Interlayer film for laminated glass and laminated glass | Shinji Kawada | 2023-12-26 |
| 11491768 | Intermediate film for laminated glass, and laminated glass | Yuki Ishikawa, Shinji Kawada, Tatsuya Iwamoto | 2022-11-08 |
| 10738380 | Deposition apparatus | Naoyuki Nozawa, Reiji Sakamoto, Masahito Ishihara | 2020-08-11 |
| 8080282 | Method for forming silicon carbide film containing oxygen | Atsuki Fukazawa, Manabu Kato | 2011-12-20 |
| 8003174 | Method for forming dielectric film using siloxane-silazane mixture | Atsuki Fukazawa, Woo Jin Lee | 2011-08-23 |
| 7781352 | Method for forming inorganic silazane-based dielectric film | Atsuki Fukazawa, Jeongseok Ha | 2010-08-24 |
| 7718553 | Method for forming insulation film having high density | Atsuki Fukazawa | 2010-05-18 |
| 7655577 | Method of forming silicon-containing insulation film having low dielectric constant and low film stress | Yasuyoshi Hyodo, Masashi Yamaguchi, Atsuki Fukazawa, Naoki Ohara, Yijun Liu | 2010-02-02 |
| 7651959 | Method for forming silazane-based dielectric film | Atsuki Fukazawa, Jeongseok Ha | 2010-01-26 |
| 7638441 | Method of forming a carbon polymer film using plasma CVD | Yoshinori Morisada, Kamal Kishore Goundar | 2009-12-29 |
| 7622369 | Device isolation technology on semiconductor substrate | Woo Jin Lee, Atsuki Fukazawa | 2009-11-24 |
| 7560144 | Method of stabilizing film quality of low-dielectric constant film | Atsuki Fukazawa, Kiyoto Itoh, Tsunayuki Kimura | 2009-07-14 |
| 7504344 | Method of forming a carbon polymer film using plasma CVD | Yoshinori Morisada, Seijiro Umemoto, Jea Sik Lee | 2009-03-17 |
| 7470633 | Method of forming a carbon polymer film using plasma CVD | Yoshinori Morisada, Seijiro Umemoto, Jea Sik Lee | 2008-12-30 |
| 7410915 | Method of forming carbon polymer film using plasma CVD | Yoshinori Morisada, Kamal Kishore Goundar, Masashi Yamaguchi, Kyu-Tae Na, Eun-Kyung Baek | 2008-08-12 |
| 7354873 | Method for forming insulation film | Atsuki Fukazawa, Seijiro Umemoto | 2008-04-08 |
| 7147900 | Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation | Naoto Tsuji, Atsuki Fukazawa, Shingo Ikeda | 2006-12-12 |
| 7148154 | Method of forming silicon-containing insulation film having low dielectric constant and low film stress | Yasuyoshi Hyodo, Masashi Yamaguchi, Atsuki Fukazawa, Naoki Ohara, Yijun Liu | 2006-12-12 |
| 7064088 | Method for forming low-k hard film | Yasuyoshi Hyodo, Atsuki Fukazawa, Yoshinori Morisada, Masashi Yamaguchi | 2006-06-20 |
| 7012268 | Gas-shield electron-beam gun for thin-film curing application | Atsuki Fukazawa, Naoto Tsuji | 2006-03-14 |
| 6881683 | Insulation film on semiconductor substrate and method for forming same | Yasuyoshi Hyodo, Masashi Yamaguchi, Yoshinori Morisada, Atsuki Fukazawa, Manabu Kato +3 more | 2005-04-19 |
| 6852650 | Insulation film on semiconductor substrate and method for forming same | Yasuyoshi Hyodo, Masashi Yamaguchi, Yoshinori Morisada, Atsuki Fukazawa, Manabu Kato | 2005-02-08 |
| 6830007 | Apparatus and method for forming low dielectric constant film | Seijiro Umemoto, Yasuyoshi Hyodo | 2004-12-14 |
| 6784123 | Insulation film on semiconductor substrate and method for forming same | Yoshinori Morisada, Yasuyoshi Hyodo, Seijiro Umemoto | 2004-08-31 |