Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7560144 | Method of stabilizing film quality of low-dielectric constant film | Atsuki Fukazawa, Tsunayuki Kimura, Nobuo Matsuki | 2009-07-14 |
| 6698469 | Cylinder cabinet and method of purging remaining gas in the pipe thereof | Yutaka Sakamoto, Tsuneo Kano, Takashi Ogawa, Hiroshi Matsumura, Toshiaki Sango +1 more | 2004-03-02 |