Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6698469 | Cylinder cabinet and method of purging remaining gas in the pipe thereof | Yutaka Sakamoto, Tsuneo Kano, Takashi Ogawa, Hiroshi Matsumura, Kiyoto Itoh +1 more | 2004-03-02 |
| 6391789 | Dry etching system for patterning target layer at high reproducibility and method of dry etching used therein | — | 2002-05-21 |