Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7504344 | Method of forming a carbon polymer film using plasma CVD | Nobuo Matsuki, Yoshinori Morisada, Jea Sik Lee | 2009-03-17 |
| 7470633 | Method of forming a carbon polymer film using plasma CVD | Nobuo Matsuki, Yoshinori Morisada, Jea Sik Lee | 2008-12-30 |
| 7354873 | Method for forming insulation film | Atsuki Fukazawa, Nobuo Matsuki | 2008-04-08 |
| 6881683 | Insulation film on semiconductor substrate and method for forming same | Nobuo Matsuki, Yasuyoshi Hyodo, Masashi Yamaguchi, Yoshinori Morisada, Atsuki Fukazawa +3 more | 2005-04-19 |
| 6830007 | Apparatus and method for forming low dielectric constant film | Nobuo Matsuki, Yasuyoshi Hyodo | 2004-12-14 |
| 6784123 | Insulation film on semiconductor substrate and method for forming same | Nobuo Matsuki, Yoshinori Morisada, Yasuyoshi Hyodo | 2004-08-31 |
| 6537928 | Apparatus and method for forming low dielectric constant film | Nobuo Matsuki, Yasuyoshi Hyodo | 2003-03-25 |