Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759344 | Method for forming low dielectric constant interlayer insulation film | Yoshinori Morisada, Atsuki Fukazawa, Manabu Kato | 2004-07-06 |
| 6740367 | Plasma CVD film-forming device | Yoshinori Morisada | 2004-05-25 |
| 6737366 | Method of forming low dielectric constant insulation film for semiconductor device | — | 2004-05-18 |
| 6653719 | Silicone polymer insulation film on semiconductor substrate | — | 2003-11-25 |
| 6631692 | Plasma CVD film-forming device | Yoshinori Morisada | 2003-10-14 |
| 6602800 | Apparatus for forming thin film on semiconductor substrate by plasma reaction | — | 2003-08-05 |
| 6559520 | Siloxan polymer film on semiconductor substrate | Lee Jea Sik, Yoshinori Morisada, Satoshi Takahashi | 2003-05-06 |
| 6537928 | Apparatus and method for forming low dielectric constant film | Seijiro Umemoto, Yasuyoshi Hyodo | 2003-03-25 |
| 6514880 | Siloxan polymer film on semiconductor substrate and method for forming same | Lee Jea Sik, Yoshinori Morisada, Satoshi Takahashi | 2003-02-04 |
| 6455445 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | — | 2002-09-24 |
| 6432846 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | — | 2002-08-13 |
| 6410463 | Method for forming film with low dielectric constant on semiconductor substrate | — | 2002-06-25 |
| 6383955 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | Yuichi Naito, Yoshinori Morisada, Aya Matsunoshita | 2002-05-07 |
| 6352945 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | Yuichi Naito, Yoshinori Morisada, Aya Matsunoshita | 2002-03-05 |
| 6149976 | Method of manufacturing fluorine-containing silicon oxide films for semiconductor device | Johannes Bart Cornelis Van Der Hilst | 2000-11-21 |