Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6149976 | Method of manufacturing fluorine-containing silicon oxide films for semiconductor device | Nobuo Matsuki | 2000-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6149976 | Method of manufacturing fluorine-containing silicon oxide films for semiconductor device | Nobuo Matsuki | 2000-11-21 |