Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7638441 | Method of forming a carbon polymer film using plasma CVD | Yoshinori Morisada, Nobuo Matsuki | 2009-12-29 |
| 7632549 | Method of forming a high transparent carbon film | — | 2009-12-15 |
| 7498242 | Plasma pre-treating surfaces for atomic layer deposition | Devendra Kumar, Nathanael R. C. Kemeling, Hideaki Fukuda, Hessel Sprey, Maarten Stokhof | 2009-03-03 |
| 7410915 | Method of forming carbon polymer film using plasma CVD | Yoshinori Morisada, Masashi Yamaguchi, Nobuo Matsuki, Kyu-Tae Na, Eun-Kyung Baek | 2008-08-12 |
| 7238393 | Method of forming silicon carbide films | Tadashi Kumakura, Kiyoshi Satoh | 2007-07-03 |
| 7138332 | Method of forming silicon carbide films | — | 2006-11-21 |
| 7091133 | Two-step formation of etch stop layer | Tadashi Kumakura | 2006-08-15 |
| 6991959 | Method of manufacturing silicon carbide film | Kiyoshi Satoh | 2006-01-31 |
| 6919270 | Method of manufacturing silicon carbide film | Kiyoshi Satoh | 2005-07-19 |
| 6849561 | Method of forming low-k films | — | 2005-02-01 |